Design and control of a novel electromagnetic actuated 3-DoFs micropositioner

In this paper, a novel electromagnetic micropositioner is designed from an orthogonal 3-P(4S) parallel mechanism through the substitution method and modular design techniques. Preliminary prototype experiments show that possesses excellent decoupling performance. Thus independent control strategy carried out for motion of micropositioner. An RBF neural networks based adaptive backstepping terminal sliding mode controller according to nonlinearity characteristics actuator. Parameters system are identified with genetic algorithm. Finally, performances developed verified. Experimental results demonstrate satisfactory can be achieved.